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1

Single mask dual damascene processes

Dung-Ching Perng, Jia-Feng Fang, Jhin-Wei Chen

Journal:

Microelectronic Engineering

Year:

2008

Language:

english

File:

PDF, 189 KB

english, 2008

2

Self-forming AlOx layer as Cu diffusion barrier on porous low-k film

Dung-Ching Perng, Jia-Bin Yeh, Kuo-Chung Hsu, Shuo-Wen Tsai

Journal:

Thin Solid Films

Year:

2010

Language:

english

File:

PDF, 532 KB

english, 2010

3

Nano-structured Cu(In,Al)Se2 near-infrared photodetectors

Chang, Ruo-Ping, Perng, Dung-Ching

Journal:

Thin Solid Films

Year:

2013

Language:

english

File:

PDF, 784 KB

english, 2013

4

Formation of wide band-gap CuInAlS2 thin film and its application to UV Detectors

Perng, Dung-Ching, Kao, Tzung-Ta, Chang, Ruo-Ping

Journal:

Thin Solid Films

Year:

2014

Language:

english

File:

PDF, 673 KB

english, 2014

5

[IEEE 2010 IEEE International Reliability Physics Symposium - Garden Grove (Anaheim), CA, USA (2010.05.2-2010.05.6)] 2010 IEEE International Reliability Physics Symposium - The TDDB failure mode and its engineering study for 45nm and beyond in porous low k dielectrics direct polish scheme

Hsu, Chia-Lin, Lu, Kuan-Ting, Lin, Wen-Chin, Lin, Jeh-Chieh, Chen, Chih-Hsien, Tsai, Teng-Chun, Huang, Climbing, Wu, J Y, Perng, Dung-Ching

Year:

2010

Language:

english

File:

PDF, 449 KB

english, 2010

6

Effects of Post-CMP Cleaning on Time Dependent Dielectric Breakdown and Electro-Migration in Porous Low-k∕Cu Interconnects

Hsu, Chia-Lin, Perng, Dung-Ching, Lin, Wen-Chin, Lu, Kuan-Ting, Tsai, Teng-Chun, Huang, Climbing, Wu, J. Y.

Journal:

Journal of The Electrochemical Society

Year:

2011

Language:

english

File:

PDF, 302 KB

english, 2011

7

ECS Transactions [ECS 218th ECS Meeting - Las Vegas, NV (October 10 - October 15, 2010)] - The TDDB Study of Post-CMP Cleaning Effect for L40 Direct Polished Porous Low K Dielectrics Cu Interconnect

Hsu, Chia-Lin, Lin, Welch, Hsu, Chun-Wei, Lin, Jen-Chieh, Tsai, Teng-Chun, Huang, Chien-Chung, Wu, J. Y., Perng, Dung-Ching

Year:

2010

Language:

english

File:

PDF, 205 KB

english, 2010

8

Enhancement of short-circuit current density in Cu2O/ZnO heterojunction solar cells

Perng, Dung-Ching, Hong, Min-Hao, Chen, Kuan-Hung, Chen, Kuan-Hua

Journal:

Journal of Alloys and Compounds

Year:

2017

Language:

english

File:

PDF, 989 KB

english, 2017

9

Phosphorous doped Ru film for advanced Cu diffusion barriers

Dung-Ching Perng, Jia-Bin Yeh, Kuo-Chung Hsu

Journal:

Applied Surface Science

Year:

2008

Language:

english

File:

PDF, 563 KB

english, 2008

10

Ru/WCoCN as a seedless Cu barrier system for advanced Cu metallization

Dung-Ching Perng, Jia-Bin Yeh, Kuo-Chung Hsu

Journal:

Applied Surface Science

Year:

2009

Language:

english

File:

PDF, 531 KB

english, 2009

11

Mechanism of forming (2 2 0/2 0 4)-oriented CuInSe2 film on Al:ZnO substrate using a two-step selenization process

Jia-Feng Fang, Dung-Ching Perng, Jhin-Wei Chen

Journal:

Journal of Crystal Growth

Year:

2011

Language:

english

File:

PDF, 1.06 MB

english, 2011

12

Thermal and Electrical Properties of PVD Ru(P) Film as Cu Diffusion Barrier

Dung-Ching Perng, Kuo-Chung Hsu, Shuo-Wen Tsai, Jia-Bin Yeh

Journal:

Microelectronic Engineering

Year:

2010

Language:

english

File:

PDF, 789 KB

english, 2010

13

Formation of CuInAlSe2 film with double graded bandgap using Mo(Al) back contact

Dung-Ching Perng, Jhin-Wei Chen, Chyi-Jeng Wu

Journal:

Solar Energy Materials and Solar Cells

Year:

2011

Language:

english

File:

PDF, 556 KB

english, 2011

14

Nano-structured Cu2O solar cells fabricated on sparse ZnO nanorods

Jhin-Wei Chen, Dung-Ching Perng, Jia-Feng Fang

Journal:

Solar Energy Materials and Solar Cells

Year:

2011

Language:

english

File:

PDF, 1011 KB

english, 2011

15

Ultrathin Cr added Ru film as a seedless Cu diffusion barrier for advanced Cu interconnects

Kuo-Chung Hsu, Dung-Ching Perng, Jia-Bin Yeh, Yi-Chun Wang

Journal:

Applied Surface Science

Year:

2012

Language:

english

File:

PDF, 1.30 MB

english, 2012

16

Robust ultra-thin RuMo alloy film as a seedless Cu diffusion barrier

Kuo-Chung Hsu, Dung-Ching Perng, Yi-Chun Wang

Journal:

Journal of Alloys and Compounds

Year:

2012

Language:

english

File:

PDF, 1.28 MB

english, 2012

17

[IEEE 2012 IEEE 38th Photovoltaic Specialists Conference (PVSC) - Austin, TX, USA (2012.06.3-2012.06.8)] 2012 38th IEEE Photovoltaic Specialists Conference - Reliability studies of mo layer deposited on polyimide substrate for CIGS solar cell applications

Perng, Dung-Ching, Hung, Ming-Chen, Wang, Kuo-Yu

Year:

2012

Language:

english

File:

PDF, 908 KB

english, 2012

18

Cu2O growth characteristics on an array of ZnO nanorods for the nano-structured solar cells

Perng, Dung-Ching, Chen, Jhin-Wei, Kao, Tzung-Ta, Chang, Ruo-Ping

Journal:

Surface and Coatings Technology

Year:

2013

Language:

english

File:

PDF, 1012 KB

english, 2013

19

Microstructural, Electrical, and Mechanical Properties of Graphene Films on Flexible Substrate Determined by Cyclic Bending Test

Nguyen, Ba-Son, Lin, Jen-Fin, Perng, Dung-Ching

Journal:

ACS Applied Materials & Interfaces

Year:

2014

Language:

english

File:

PDF, 3.85 MB

english, 2014

20

[IEEE 2009 IEEE International Interconnect Technology Conference - IITC - Sapporo, Japan (2009.06.1-2009.06.3)] 2009 IEEE International Interconnect Technology Conference - Defect study of manufacturing feasible porous low k dielectrics direct polish for 45nm technology and beyond

Hsu, Chia-Lin, Fang, Jeng Yu, Art Yu,, Jack Lin,, Climbing Huang,, Wu, J. Y., Perng, Dung-Ching

Year:

2009

Language:

english

File:

PDF, 2.80 MB

english, 2009

21

Near-infrared photodetector with CuIn1−x AlxSe2 thin film

Chang, Ruo-Ping, Perng, Dung-Ching

Journal:

Applied Physics Letters

Year:

2011

Language:

english

File:

PDF, 641 KB

english, 2011

22

1-nm-thick graphene tri-layer as the ultimate copper diffusion barrier

Nguyen, Ba-Son, Lin, Jen-Fin, Perng, Dung-Ching

Journal:

Applied Physics Letters

Year:

2014

Language:

english

File:

PDF, 1.62 MB

english, 2014

23

[IEEE 2010 35th IEEE Photovoltaic Specialists Conference (PVSC) - Honolulu, HI, USA (2010.06.20-2010.06.25)] 2010 35th IEEE Photovoltaic Specialists Conference - Influences of the substrate structure on the growth of CuInSe2 and In2Se3thin films

Perng, Dung-Ching, Tsai, Meng-Shian, Wu, Po-Yi, Fang, Jia-Feng

Year:

2010

Language:

english

File:

PDF, 837 KB

english, 2010

24

Nano-Structured ZnSe/CIS Heterojunction Solar Cells with ZnSe/ZnO Coaxial Nanowires

Perng, Dung-Ching, Fang, Jia-Feng, Chen, Jhin-Wei

Journal:

Journal of The Electrochemical Society

Year:

2011

Language:

english

File:

PDF, 1.19 MB

english, 2011

25

Electrochemical Studies of W Corrosion for Low Resistive Contact in the 28 nm Technology Node

Hsu, Chia-Lin, Perng, Dung-Ching, Chen, Yen-Ming, Huang, Shu-Min, Li, Yu-Ting, Kung, Chang-Hung, Lin, Chih-Hsun, Yang, Yu-Ru, Lin, Chin-Fu, Huang, Climbing, Wu, J. Y.

Journal:

Journal of The Electrochemical Society

Year:

2012

Language:

english

File:

PDF, 212 KB

english, 2012

26

Amorphous RuW Film as a Diffusion Barrier for Advanced Cu Metallization

Yeh, Jia-Bin, Perng, Dung-Ching, Hsu, Kuo-Chung

Journal:

Journal of The Electrochemical Society

Year:

2010

Language:

english

File:

PDF, 837 KB

english, 2010

27

5 nm Amorphous Boron and Carbon Added Ru Film as a Highly Reliable Cu Diffusion Barrier

Perng, Dung-Ching, Yeh, Jia-Bin, Hsu, Kuo-Chung, Wang, Yi-Chun

Journal:

Electrochemical and Solid-State Letters

Year:

2010

Language:

english

File:

PDF, 775 KB

english, 2010

28

Non-vacuum growth of graphene films using solid carbon source

Nguyen, Ba-Son, Lin, Jen-Fin, Perng, Dung-Ching

Journal:

Applied Physics Letters

Year:

2015

Language:

english

File:

PDF, 1.30 MB

english, 2015

29

SPIE Proceedings [SPIE Optical Engineering Midwest 1992 - Chicago, IL (Thursday 19 March 1992)] Imaging Technologies and Applications - Micromachined electron source

Crewe, David A., Perng, Dung-Ching, Shoaf, S. E., Feinerman, Alan D., Heaston, Robert J.

Year:

1992

Language:

english

File:

PDF, 331 KB

english, 1992

30

SPIE Proceedings [SPIE SPIE's 1994 Symposium on Microlithography - San Jose, CA (Sunday 27 February 1994)] Electron-Beam, X-Ray, and Ion-Beam Submicrometer Lithographies for Manufacturing IV - Miniature electron microscopes for lithography

Feinerman, Alan D., Crewe, David A., Perng, Dung-Ching, Spindt, Capp A., Schwoebel, Paul R., Crewe, Albert V., Patterson, David O.

Year:

1994

Language:

english

File:

PDF, 948 KB

english, 1994

31

SPIE Proceedings [SPIE Optical Engineering Midwest 1992 - Chicago, IL (Thursday 19 March 1992)] Imaging Technologies and Applications - High-throughput electron-beam lithography

Feinerman, Alan D., Crewe, David A., Perng, Dung-Ching, Shoaf, S. E., Crewe, Albert V., Heaston, Robert J.

Year:

1992

Language:

english

File:

PDF, 577 KB

english, 1992

32

SPIE Proceedings [SPIE Optical Engineering Midwest 1992 - Chicago, IL (Thursday 19 March 1992)] Imaging Technologies and Applications - Micromachined thermionic emitter

Perng, Dung-Ching, Crewe, David A., Lee, Sung B., Feinerman, Alan D., Heaston, Robert J.

Year:

1992

Language:

english

File:

PDF, 326 KB

english, 1992

33

High-performance ultraviolet detection and visible-blind photodetector based on Cu 2 O/ZnO nanorods with poly-( N -vinylcarbazole) intermediate layer

Perng, Dung-Ching, Lin, Hsueh-Pin, Hong, Min-Hao

Journal:

Applied Physics Letters

Year:

2015

Language:

english

File:

PDF, 1.07 MB

english, 2015

34

Electrodeposited CuSCN metal-semiconductor-metal high performance deep-ultraviolet photodetector

Lin, Hsueh-Pin, Lin, Xuan-Jun, Perng, Dung-Ching

Journal:

Applied Physics Letters

Year:

2018

Language:

english

File:

PDF, 1.35 MB

english, 2018

35

Effects on selective epitaxial growth of strained-SiGe p-MOSFETs on various (001) Si recess structures

Hong, Min-Hao, Perng, Dung-Ching

Journal:

Journal of Theoretical and Applied Physics

Year:

2018

Language:

english

File:

PDF, 1020 KB

english, 2018

36

Organic light-emitting diodes with an electro-deposited copper(I) thiocyanate (CuSCN) hole-injection layer based on aqueous electrolyte

Tsai, Chi-Ting, Gottam, Sandeep Reddy, Kao, Po-Ching, Perng, Dung-Ching, Chu, Sheng-Yuan

Journal:

Synthetic Metals

Year:

2019

Language:

english

File:

PDF, 7.05 MB

english, 2019

37

Fast-Response and Self-Powered Cu 2 O/ZnO Nanorods Heterojunction UV-Visible (570 nm) Photodetectors

Lin, Hsueh-Pin, Lin, Po-Yi, Perng, Dung-Ching

Journal:

Journal of The Electrochemical Society

Year:

2020

File:

PDF, 1.13 MB

2020

38

Improvement of OLED performances by applying annealing and surface treatment on electro-deposited CuSCN hole injection layer

Tsai, Chi-Ting, Gottam, Sandeep Reddy, Kao, Po-Ching, Perng, Dung-Ching, Chu, Sheng-Yuan

Journal:

Synthetic Metals

Year:

2020

File:

PDF, 5.61 MB

2020